"Where did this Shenguang instrument come from?" President Zhao Jun put down the document in surprise.

"According to our investigation, Shenguang Instrument Company is affiliated to Siweishe, and the founder of Siweishe is Huang Mingzhe, and Dream Company, which owns Siwei.com, is also a subsidiary of Siweishe." The assistant to the president said quickly.

"Huang Mingzhe"

"It is Huang Mingzhe, the overlord of mathematics and the chief engineer of the Houyi Project."

Chief Technology Officer Li Weiguang said in astonishment: "This guy is so good that he can even make a lithography machine."

"The Ministry of Industry and Information Technology has come out to endorse. It is estimated that it is probably close to ten. We will go to Shanmei immediately." Zhao Jun said decisively.

"it is good."

Thinking of the encounters made by ASML, Nikon, and Canon over the years, the senior management of SMIC has decided that if the performance of the Shenguang 1 X-ray lithography machine is [-]% to [-]%, they will buy it immediately.

At the same time, other domestic chip manufacturers responded quickly.

Huada Semiconductor, Ziguang, and Yangtze River Storage all ran to Shanmei.

Even HiSilicon, which manufactures microelectronics and chip designs for low-end lithography machines, sent heavyweight representatives in the past.

If it was just a birth certificate, they would not have such a big reaction, but with tax cuts and subsidies, it is obvious that the technology of Shenguang Instruments must have solid products, otherwise there would not be so many favorable policies.

As for foreign countries.

Their first reaction was that this was fake news, and their second reaction was to immediately investigate the details of Shenguang Instruments.

When ASML heard the news, they didn't pay much attention to it. After all, they knew Huaguo's lithography machine technology clearly, and they probably were another grandstanding liar, such as the Hanxin incident back then.

Many arrogant Westerners do not believe that Huaguo can produce a lithography machine.

Of course, there are still a lot of smart people in the West. The low-level sheep and pigs may not care, but the upper-level elites did not despise Huaguo.

An undercover investigation quickly unfolded, and if it was true, the problem was serious.

……

Zhao Jun and Li Weiguang took the people from SMIC and rushed to Shanmei without stopping. They and the representatives of HiSilicon arrived almost at the same time.

He didn't even care about eating, so he went straight to the address of Shenguang Instrument Company.

Gao Zhiyuan, who was busy with the second lithography machine, had to stop his work when he heard the report from his assistant that SMIC and HiSilicon had arrived at the door.

As a company that masters top-level lithography machine technology, Gao Zhiyuan has no idea of ​​looking for orders, and sells them door-to-door. Doesn’t it seem that Shenguang Instruments needs others, and it is out of line to do so.

No, the order was delivered to the door by itself, and it is so arrogant to have technology.

When we came to the door, two groups of people had already blocked the door. There were only six or seven people from HiSilicon, while SMIC seemed to have a lot of high-level personnel, and there were always no less than 50 people.

Obviously, SMIC came prepared to inspect the lithography machine of Shenguang Instrument.

"Everyone is very welcome to come from afar. Mr. Zhao, Mr. Li, and Mr. Fang are welcome." Gao Zhiyuan led the way with a smile.

The three parties exchanged a few casual greetings, and then got straight to the point, especially SMIC, they could not wait to see the actual product of the Shenguang 1 X-ray lithography machine.

"Mr. Zhao, our company's internal management is very strict. Too many people can't enter at one time. You choose ten people." After Gao Zhiyuan finished speaking, he turned his head and said to Fang Long of Haisi:

"Mr. Fang, go to the side and change your work clothes first!"

"no problem."

Six people from Haisi followed the staff to change their work clothes.

And SMIC quickly selected ten people, and Gao Zhiyuan took them to change their work clothes.

Then there is dust removal, static electricity removal, etc., and finally they enter the inspection room where the Shenguang 1X-ray lithography machine is displayed.

Chapter 69 Huge Order

In the inspection room, the Shenguang 1X-ray lithography machine is running, and a group of staff are still tirelessly testing and adjusting.

As the chief technology executive of SMIC, Li Weiguang, the officer, has a decent technical level. His eyes are staring at the behemoth in front of him. What a wonderful industrial flower this is.

Li Weiguang thought to himself, I hope this lithography machine is a beauty with a beautiful appearance and wisdom, not a golden jade.

Gao Zhiyuan pointed to the lithography machine and introduced: "The lithography machine in front of everyone is the Shenguang 1X-ray lithography machine developed by our Shenguang Instrument. I think you have already understood the specific technical indicators."

Of course, Li Weiguang, Zhao Jun and others knew that the appendix of the Ministry of Industry and Information Technology's announcement contained the technical specifications of the Shenguang 1 X-ray lithography machine, and they had already studied it halfway.

"Mr. Gao, the precision of your lithography machine can really reach 10-7 nanometers," Li Weiguang asked hurriedly.

"I know everyone is very skeptical. There are eight-inch silicon wafers on the side. SMIC should have brought technicians over."

Li Weiguang nodded.

Gao Zhiyuan pointed to the warehouse on one side and continued: "You can send someone to hold the silicon wafer and conduct photolithography tests with our employees."

"Then we'd better obey orders than be respectful." Li Weiguang turned his head and ordered to the SMIC people: "Mr. Zhang, Mr. Li, please forgive me."

The two middle-aged technicians worked quickly, and they carefully took out the silicon wafer with the help of tools.

These silicon wafers are not only expensive, but also very fragile, not to mention falling on the ground, even if it is air, it is best not to touch it directly, because it will be very troublesome to be contaminated with dust.

Send two silicon wafers into special cleaning equipment, then apply photoresist, flatten the photoresist to a certain thickness, and dry the photoresist on the surface of the silicon wafer.

The process is very complicated, and there must be no mistakes. This not only tests the machinery and equipment, but also tests the level of technicians.

If there is a mistake in one of the links, not only is it a waste of time, but also consumables such as silicon wafers, photoresists, and cleaning fluids are wasted. These are real money.

No wonder it is said that scientific research is burning money.

After more than an hour, it finally came to the step of silicon wafer lithography, and an eight-inch silicon wafer was fed into it by the automation equipment of the lithography machine.

In order to avoid affecting the photolithography effect, Li Gong observed the silicon wafer through a small window lens for a while, and then closed the small window to form a dark box in the photolithography room.

Zhang Gong selected some mask templates (circuit diagram motherboards) on the computer, randomly selected one of the templates, and entered the size adjustment.

Because different chip circuit diagrams require different areas, the number of chips that can be engraved on a silicon wafer should be adjusted according to the actual situation.

The staff members communicate with each other with simple gestures. Even speaking loudly around such high-precision equipment may affect the lithography results.

Lithography begins.

In about 16 seconds, the photolithographically completed silicon wafer will have an exit on the other side.

Then the second silicon wafer was quickly processed, and it came out in about 16 seconds.

Zhao Jun, Li Weiguang, Fang Long and others outside the inspection room were all staring at the two photolithographically completed silicon wafers.

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