Ultra-Dimensional Technology Era

The security of Shenguang Instrument Company is much stricter than before, and five Chinese pastoral dogs are also equipped. After all, the lithography machine technology is too sensitive.

In the empty top-level dust-free assembly room, Gao Zhiyuan personally led hundreds of employees and dozens of researchers to work.

In the test room beside it, the first X-ray lithography machine is being tested and adjusted continuously. After all, it is the first generation product. There may not be many major problems, but minor problems are definitely inevitable.

Huang Mingzhe took Huang Anguo and the dozen or so experts, changed into special work clothes, and cleaned them through dust removal and static electricity removal before entering the testing room.

As soon as a group of experts entered the testing room, they were attracted by the X-ray lithography machine on display.

"Mr. Huang, what is the standard for the X-ray radiation dose of the X-ray lithography machine?" one of the experts asked quickly.

This issue is very important. The penetrating power of X-rays is very strong. If the radiation dose exceeds the standard, there will be physical problems for employees.

"This is a radiation dose detector, you can test it."

Several experts operate an ultra-high-precision environmental radiation detector.

[0.003602mSv]

"It's so small, only 0.003602 millisieverts."

"Test other locations as well."

In fact, because the photoresist of the X-ray lithography machine has a very high photosensitivity, the power of the X-ray laser is very small.

In addition, when developing photoresist, the Institute of Materials produced some by-products, including materials that can absorb X-rays.

Shenguang Instrument paid great attention to the problem of X-ray radiation at the very beginning of its design. They used this material to manufacture some detachable radiation-absorbing partitions.

These partitions can absorb most of the scattered X-rays, thereby reducing the radiation dose of X-rays to the surrounding environment.

Although doing this requires replacing the partitions every once in a while, at least the employees will not be exposed to excessive radiation.

In fact, the current radiation dose is much smaller than the X-ray film (0.1mSv) and CT (2-15mSv) in the hospital, which is similar to the radiation dose we receive when watching TV every day.

In addition, the protective clothing of the staff is also a product modified by Shenguang Instrument, which can further block X-rays, so the environmental radiation here is not much different from the outside environment.

"The whole is in line with expectations, and the environmental radiation dose is between 0.0032 and 0.0047 millisieverts."

The official personnel in charge of recording hurriedly recorded the data on the form.

The next step is the highlight. These experts borrowed the equipment of Shenguang Instrument to test the accuracy of the lithography machine and other parameters.

This job alone took them over a week, mainly to make sure that nothing would go wrong, lest it become an international joke in time.

Chapter 68 Turned Out

"Since Huang, through the unanimous inspection of 15 members of our expert team, the X-ray lithography machine developed by Shenguang Instrument Company conforms to the description in the application materials." The leader of the expert team said happily.

The big rock in Huang Anguo's heart finally fell, he was so happy that he walked around at a loss, and it took a while before he calmed down his excitement.

"Let's go see Mr. Huang."

Thinking Club Headquarters.

Huang Anguo and the others hurried to the second floor after getting off the car.

"Director Huang, how are the tests these days?"

"Our expert team has completed the inspection, and the birth certificate will come out in a few days." After speaking, Huang Anguo picked up his teacup and took a big sip.

call!

"These are really troublesome, I will replace wine with tea." Huang Mingzhe smiled and picked up the teacup and said.

"Boss Huang is polite, it's all part of his job." The leader of the expert team didn't dare to take credit for it.

Huang Anguo couldn't wait to continue: "Mr. Huang, is the lithography machine of Shenguang Instrument ready for mass production?"

"Mass production is of course necessary, but there are no orders for the time being, and our business depends on the pot." Huang Mingzhe replied with a smile.

Everyone also understands this situation. After all, things like lithography machines are not cheap at first glance. They can't be put into warehouses after production and wait for someone to buy them!

If there is any accident or force majeure, wouldn't it be rotten in his own hands.

"Then I don't know how much the X-ray lithography machine sells for," Huang Anguo continued to ask.

"15 billion units." Huang Mingzhe said without blushing.

The price of 15 billion can only be said to be high, but it is acceptable. After all, ASML's top-level lithography machine is about 1.2 million US dollars. The key is that they will not sell it to Huaguo Company.

However, the lithography machine of Shenguang Instrument can generally use 10-2 nanometers in precision, which is a huge advantage.

Compare with ASML's top extreme ultraviolet lithography machine that has just been mass-produced this year.

ASML's top lithography machine: light source - extreme ultraviolet light (wavelength 13.7 nanometers), the equipment can be adjusted to achieve a 13.7-7 nanometer lithography process, and the production efficiency is to process 10 300mm wafers (silicon wafers) per hour ).

Shenguang X-ray lithography machine: light source - X-ray (wavelength 8 nanometers), the equipment can be adjusted to achieve 10-2 nanometer lithography process, and the production efficiency is 150 200mm wafers (silicon wafers) per hour .

Why does Shenguang X-ray lithography machine use 200 mm (8-inch wafers) for silicon wafers, but it is not impossible to use 300 mm (12-inch wafers), mainly because silicon wafers that can be mass-produced in China are currently 200 mm. .

From the perspective of silicon wafer processing speed, Shenguang is 7.5 times faster than ASML.

And Huang Mingzhe did not intend to sell the Shenguang X-ray lithography machine in the strongest state. The specifications of the silicon wafer, the photoresist, and the processing accuracy can be upgraded. Only by slowly squeezing the toothpaste can the profit be maximized.

After Huang Anguo and Huang Mingzhe exchanged some opinions, they rushed back to Beiping in a hurry.

……

2 month 20 day.

The official website of the Ministry of Industry and Information Technology announced three pieces of information, like a nuclear bomb falling into a calm lake.

[Announcement on Approving the Production of Shenguang Instrument Company Shenguang 1 X-ray Lithography Machine]

[Announcement on tax reduction and exemption for Shenguang Instrument Company from 2013 to 2015 (State Administration of Taxation)]

[Announcement on Subsidies for Domestic Enterprises to Purchase Shenguang 1 X-ray Lithography Machine (Ministry of Commerce and Ministry of Finance)]

Obviously, this information reveals a very important message, that is, Huaguo's lithography machine technology has made a breakthrough.

The major official media and online media immediately seized the opportunity and wrote a lot.

For a while, all parts of the country knew about this matter, and the general public only regarded it as a topic of conversation after dinner, but in the eyes of relevant practitioners, this was no less than the mushroom cloud in Lop Nur.

SMIC.

CEO's office.