Black Technology Refresher Manual
Chapter 69 Shan Wei [01] 13.5nm process.
Sheng Mingan propped his cheek with one hand, looking down at the ripples of the brown strong tea, thinking about the laser used in the light source system, how to make the laser structure suitable for the light source, that is, the output laser and power of the preamplifier and the main amplifier, how to cooperate Use alternately?
Under the premise that the signal gain of the laser is inversely proportional to the pressure of the gas, the fast cross-flow co2 technology can be considered in the system.
The second is light source optimization.
Based on the particle swarm optimization algorithm, the formula v^(k+1)=w v^(k)...
Light source and mask, light source normalization...
"Ming An?...Sheng Ming An?"
Sheng Ming'an came back to his senses, met Chen Jingqiu's quiet and dark eyes, scratched his cheek with his index finger and asked, "Is there something wrong?"
Chen Jingqiu was helpless: "Can you be distracted during the break?"
Sheng Ming'an: "I'm thinking about the algorithm of laser structure and light source optimization."
Chen Jingqiu: "Break is to let the brain empty and relax. You see, Lin Chengjian and the others drink tea and gossip as soon as they arrive in the lounge, and they never mention scientific research projects."
Sheng Mingan looked back and realized that Lin Chengjian and the others had all left.
"They were just discussing the double-bench R&D team and comparing each other. I feel too much pressure, so I don't want to hear it."
Chen Jingqiu stared at Sheng Mingan, and after a few seconds came to a conclusion: "It's a lie. I'm afraid you don't know how to write the word pressure."
Sheng Ming'an propped his head and looked directly at Chen Jingqiu's gaze, with curved eyebrows and eyes: "I'm really under pressure. I submitted an application for early graduation in June. When the time comes up? I can't make up the remaining two years of credits, so I can only do it as soon as possible." Solve the light source system, rely on this to make the school network open, and agree that you and I can complete credits as special talents."
Chen Jingqiu picked up the white porcelain cup by his elbow and poured black coffee. While operating the coffee machine, he said, "Don't count me in, I've almost completed my credits."
Sheng Ming'an was stunned: "Where did you find the time to study?"
Chen Jingqiu laughed: "Me? It's not like you have to spend all day in the laboratory to follow the progress of research and development. Except for some things at work that need to be dealt with, the rest of the time is very free."
Yeah?Sheng Mingan was a little skeptical, he always thought that Chen Jingqiu was very busy.
The truth is that Chen Jingqiu is not as idle as he says, he is just good at using every minute and every second, and knows how to deal with two equally important things that are incompatible in time and space contradiction.
It's about EQ, and a skill acquired by struggling to survive from the cracks. That's something that the simple and transparent Sheng Ming'an can't understand if he doesn't come here.
Chen Jingqiu stretched out his hand and said, "Give me the thermos cup, and I'll help you remake the pot of tea."
Sheng Ming'an's eyes fell on Chen Jingqiu's open palm. The palm was white and clean, with clear palm lines and deep lines. The lines representing emotion grew deep into the gap between the index finger and middle finger.
The deeper and longer the line of emotion, the more affectionate and meaningful the owner.
Sheng Ming'an handed the thermos cup at his elbow to Chen Jingqiu, who took it, opened the lid and poured out the unfiltered tea dregs inside, and then dug out a few cans of unknown tea leaves from the tea cabinet.
What kind of tea should be grasped more? A little bit, what should be grasped less, Chen Jingqiu seems to have taken a scale and weighed it. After grasping it, put it into the filter bag, boil hot water to brew it again, pour it out, and brew it again. The action is smooth and smooth .
The cuffs that were rolled up to the elbows accidentally fell off? Chen Jingqiu stroked them back casually, the wrist bones were still prominent, skinny and sharp, but not lacking in strength.
Sheng Mingan blinked, and when Chen Jingqiu handed over the thermos cup, he suddenly grabbed Chen Jingqiu's wrist and found that he was still a long way from being able to completely enclose it.
His fingers were already slender enough, but he still couldn't wrap around Chen Jingqiu's wrist.
No wonder Chen Jingqiu's wrist looks so thin but still full of strength, because the bones are big and covered with a layer of lean flesh, so it looks extraordinarily sharp.
Chen Jingqiu took a breath, and his Adam's apple rolled: "What... are you doing?"
Sheng Ming'an raised his head: "I? Can't be restrained."
The distance is quite close, Chen Jingqiu is dazed.
Sheng Mingan has grown up in the past two years. He has grown from a boy to a slender and tall young man. His face is more beautiful, and his eyebrows and eyes are carefully carved. If he approaches him suddenly, he will be fascinated by this beautiful and cold shock. .
Sheng Mingan felt that it was not interesting so he withdrew his hand. Chen Jingqiu suddenly grabbed his hand. It was soft and fair, a little dry, with even flesh and blood, and his fingertips were glowing a healthy pink. He couldn't help but want to kiss this hand. Nice cute fingertips.
"Chen Jingqiu?"
After calling a few times, Chen Jingqiu came back from the charming thoughts, met Shang Sheng Mingan's suspicious eyes, and put down his hand as if nothing had happened: "Suddenly touched me? Your wrist is itchy, conditioned reflex."
"Oh." Sheng Mingan didn't suspect anything, took the thermos, squeezed his sore shoulders, and said at the same time as Chen Jingqiu: "The research and development of the light source system is at a critical moment, so I won't go to lunch break to waste time."
Chen Jingqiu's heart was still burning hot. Hearing the words, he didn't say much. He tried to dissuade him. He nodded in response and said, "I'm going to do the work at hand too."
The two left the tea room together and went to the underground laboratory. On the way, they saw Ji Hai hurrying out of the office? He entered the elevator and went back to the first floor. They probably skipped work again and left.
Sheng Ming'an: "Ji Hai? Isn't someone going to deal with it as soon as possible?"
Ji Hai hadn't contacted Zheng He for several months, and they all guessed that Zheng He didn't think that Blue River Technology would pose a threat to Hongxin, so he gave up stealing Blue River Technology's core technology, and at the same time gave up Ji Hai's pawn.
But Chen Jingqiu has not dealt with Ji Hai so far, Sheng Mingan is a little puzzled.
"It doesn't matter if he's around." Chen Jingqiu said: "And I? Hope to make the best use of everything."
The implication is that getting rid of Ji Hai now cannot maximize the benefits.
Sheng Mingan said 'Oh', as if thinking of something, he reminded: "Chen Tianhe may have something to do with Hongxin."
Chen Jingqiu turned his face sideways, his eyes were a little sharp: "How does Ming An know?"
Ming An?
No one has ever called him that before, but Chen Jingqiu has blurted out several times recently, calling him this? It seems very intimate and ambiguous to take off a surname and only call him by his first name.
Sheng Mingan replied to him: "The directors of my foreign company strongly demanded to invest in Hongxin the year before last, so while I noticed Hongxin, I also found that the relationship between Chen Tianhe and Hongxin was a bit strange. I suspect that Chen Tianhe is probably The boss behind Hongxin."
Of course he can't say that the system told him this secret.
Chen Jingqiu said in a low voice, "As long as you notice, you won't be able to hide it from you."
Does this mean that he has long been aware of the relationship between Chen Tianhe and Hongxin?
Chen Jingqiu: "Don't worry, I? I was prepared."
Sheng Ming'an responded, waved his hand, and changed into the equipment for a dust-free constant temperature laboratory, and entered the laboratory.Chen Jingqiu also went in and was busy for a while, during which Lin Chengjian called out?
Lin Chengjian: "Secretary Cao is looking for you."
Chen Jingqiu took off his mask and mask, took off his gloves, and paused, "Cao Wenhan, deputy secretary of the Tianjin Municipal Party Committee?"
Lin Chengjian: "Yes."
Chen Jingqiu sorted out what had happened recently in his mind, and finally said with a smile: "It seems that Hongxin is about to declare bankruptcy if it can't hold on. Chen Tianhe gave up without even putting on a show, but Cao Wenhan found For Blue River Technology, the turmoil of Hongxin's bankruptcy should have spread more than we originally estimated."
He knew Chen Tianhe very well, and he knew that this person was only looking for profit, and it was impossible for him to really waste money and spend on lithography machines.
Hongxin and Gexin are both projects in the same industry. He has been secretly paying attention to the development progress of the Hongxin project, and he is very clear about the development progress of the other party's lithography machine. After all, Zheng He is not the only one who came up with the undercover trick.
Hongxin will go bankrupt, sooner or later.
Taking off the gloves and the lab coat on his body, hanging them up neatly, putting a name tag on them, closing the cabinet door, Chen Jingqiu put on a thin casual suit jacket, and strode out.
"Cao Wenhan went to Blue River Technology, and someone should guide him." Lin Chengjian said.
Chen Jingqiu: "Chen Tianhe must be one of them."
The two went back to the top floor one after the other to see Cao Wenhan who came to visit in person. The door of the office was closed, and the two sides did not know what they talked about inside.When the sun gradually slanted to the west, Cao Wenhan came out with a happy face. He shook hands with Chen Jingqiu, who escorted him to the elevator door, and left.
When Cao Wenhan visited Blue River Technology, he didn't disturb others much, but when he returned to the city hall, he started to deal with a series of troubles caused by Hongxin's fall. Ministry of Commerce.
For a while, people panicked.
***
At the beginning of May, Hongxin struggled to support, sold lithography machines worth 4 million yuan, mortgaged equipment and land, and eased the financial distress. However, the chip supply was cut off for one day? It has not been resolved, and no matter how much money is filled in, it is useless.
Companies that are also dragged down by chip supply cuts include Huaxing, as well as many other downstream industries.
Other affiliated companies in the semiconductor industry saw that Huaxing and Hongxin were so embarrassed by the US Department of Commerce's simple chip export ban, and couldn't help but feel cold, so they quietly worked hard in private to delay their survival time as much as possible.
The news that a professor at Shuimu University has developed a double workbench for a lithography machine has become a stimulant for the industry, injecting a little vitality into the sluggish Huaguo semiconductor industry.
At the end of May, the light source system in the Blue River Science and Technology Laboratory entered the acceptance stage.
In cooperation with Chuncheng Institute of Optics and Mechanics, the optical system (a series of optical components such as precision lenses, mirrors and lenses) provided by Guoke Precision, which is a shareholder of Spring City Institute of Optics and Mechanics, is based on this optical system. acceptance of the experiment.
Sheng Mingan served as the chief engineer of the light source system, with Dean Cheng on his left and Chen Jingqiu on his right. Behind him were Lei Ke and his team and the R&D team brought by Dean Cheng.
Originally, the research and development process of the light source system was not so fast, but with Dean Cheng's research and development team, it was even more powerful, and the process was quickly shortened by half.
Now is the moment of acceptance of the light source system, not the simulation or modeling run on the computer software, but the experimental acceptance stage of the light source system of the real equipment!
Lei Ke swallowed nervously, and caught sight of Du Song from the corner of his eye? This guy was so nervous that his arms were shaking!
Really? Not promising!
As he thought about it, he didn't know that his performance wasn't much better.
It is estimated that no one present is not nervous, oh, except for Sheng Ming'an, who is very calm during the acceptance stage of any major scientific project, like an outsider, which makes people both envious and jealous.
Dean Cheng glanced at the electronic watch on the right, and the time was 19:42:31.
He said softly: "Let's get started."
After a pause, Dean Cheng said: "Sheng Gong, why don't you come?"
"Huh?" Sheng Ming'an was a little surprised. To be honest, Dean Cheng was a few rounds higher than him in terms of seniority and seniority. He was embarrassed to be called 'Sheng Gong' by the elders and humbly said: "You call me? The name is fine. Light source The research and development of the system also has your part, or you come?"
Dean Cheng waved his hand and refused with a smile: "I? In this? Life, I have carried out many scientific? Large-scale project acceptance stages, so I won't compete with young people for the experimental acceptance of a light source system. Besides? The light source system is mainly planned and completed by you. , I? It’s just a support that came out halfway, don’t refuse if you do, and it’s time to get off work if you continue.”
Fine.Sheng Ming'an nodded, signaling the R&D team behind him to take their positions, staring at the full set of light source system equipment in front, and said calmly: "Start the acceptance. Get ready—"
"Data recording, light source acceptance recording, and power consumption recording have been started."
"The target device is confirmed? Loading is complete."
"Is the power supply OK?"
"The [-]-watt carbon dioxide pulsed laser has entered the preheating state."
"..."
One after another of the reports came and went in the empty, pale and silent laboratory. Each sentence of the report was short and powerful, well-arranged, neat and fast, and for no reason affected the nervous anticipation of other R&D team members who were waiting for the acceptance results.
"Activate the carbon dioxide pulse laser!"
As soon as the voice fell, Sheng Mingan pressed the switch button, and everyone looked up at the light source system equipment in the constant temperature and dust-free laboratory ahead. The spotless silver-white equipment exuded a wonderful inorganic mechanical beauty under the cold light.
The surface of the machine is very calm, Sheng Ming'an and others can't see the changes that are happening inside, they can only judge whether it is successful or not based on the final result, and the process is very short and fast, as fast as [-] times per second!
Sheng Mingan's black technology system can spy on the changes inside the machine. It switches the viewing angle to help Sheng Mingan enter the light source system equipment to view the experiment.
The angle of view is first the silver-white machinery, and it instantly penetrates into the equipment that is as complex as a huge mechanical processing factory. Time and space are blurred, and the interior is dark, like a chaotic universe that has not yet opened.
Suddenly, there is a shining light spot in front of you. First, four hairline-sized curves surround a circle. A point of light in the center of the circle gradually expands outward, expanding from a dot to an oval shape. The light becomes more and more intense and more and more Bright, flashing and dazzling white light suddenly burst out, instantly illuminating the dark interior, a slender and shiny purple light burst out of the light opening, passed through the long round tube, entered the beam corrector, and passed through the energy converter...
Eventually it hits the target material (tin droplet) with a diameter of 30 μm.
The angle of view follows one of the rays, and suddenly pulls back, and within the range of the angle of view, tens of thousands of purple slender rays pass through one round long tube after another, and finally hit the same target material ionized tin twice on average. Atoms, release plasma?, excite nano-scale photons, and complete the exposure step of the lithography machine.
Even if the viewing angle is further back, even a system with 200 years of advanced technology cannot help but be shocked by the interior of the EUV, which is known as the crown of the industry.
The laser beam is homogenized and collected by multiple mirrors, projected on the mask, and hits the target material to obtain the required plasma.
The next step is to use the collecting mirror to collect the plasma? The divergent euv radiation is converged into a light source and sent to the photolithography system, and the final ic wafer is obtained through the exposure system.
However, Sheng Ming'an's team did not do the next two steps, but only designed the experimental design of the light source system.
The high frequency of [-] times per second not only needs to ensure that the process is error-free, but also must ensure accuracy, precision, mass production, and maximize power utilization, etc...
Therefore, the results of one experiment cannot prove anything. They have performed multiple consecutive experiments, recorded the data for comparison, and calculated an optimal probability.
With the crackling of the keyboard, everyone waited with bated breath.
The assistant girl suddenly grabbed Du Song's arm and grinned: "giao! How's it going?!"
Du Song also bared his teeth in pain, almost crying: "I? I don't know."
The assistant girl again? She didn't want him to answer, her eyes sneaked towards Sheng Ming'an, and she was sobbing in her heart. Even if she was covered from head to toe in a dustproof suit, Sheng Gong was still extremely handsome, so hurry up and tell her the result!
Sheng Mingan: "Each group reports the results."
coming!
Everyone is excited!
A group of reports: "The carbon dioxide pulsed laser is non-destructive, the power consumption is within the estimated range, and the light utilization rate successfully reaches 2%!"
Report from the second group: "The cooling system is activated! The cooling function is normal!"
Three groups of reports: "Sensor feedback laser and droplet synchronously aligned, laser plasma captured within the estimated range!"
Four sets of reports...
As one after another reports that were identical to the simulation estimates came to everyone's ears, it indicated that the experimental acceptance of the light source system equipment was successfully completed!
Everyone held their breath and waited for Sheng Mingan to conclude.
Sheng Mingan lived up to expectations. After listening to the results reports of each group, he announced to the loudspeaker: "The high-end lithography machine light source system technology research project has successfully passed the acceptance." He slightly raised the volume, "Our scientific research project, laser plasma? The UV? Lithography light source is—"
"13.5nm!"
The smiles that had just risen on the faces of the people who wanted to cheer suddenly froze, their pupils gradually dilated, their breathing was short of breath, and they couldn't believe it. They thought their ears were broken and they had auditory hallucinations.
There was a relaxed smile in Sheng Ming'an's tone: "Congratulations, everyone."
Seeing no response from the crowd, he turned his head and wondered, "Aren't you satisfied?"
Lin Chengjian was also dumbfounded, and asked cautiously: "Sheng Gong, you just said? 13.5nm...not 16nm?"
Dean Cheng, who had already been shocked after arguing with Sheng Ming'an for nearly half a month, looked around amusedly at everyone's different expressions.
Lei Ke was softer than Lin Chengjian: "Is it 14nm more accurate than asmleuv's 0.5nm?"
Du Song clutched his heart, and murmured: "Isn't it... I? This is what I study all day long?"
The assistant pinched harder, but Du Song's excited soul and excited nerves could soothe the pain in his body.
"Ah," Sheng Ming'an subconsciously looked at Chen Jingqiu: "Do you all have any objections?"
After being surprised, Chen Jingqiu smiled: "There is no objection. They were overjoyed."
Sheng Mingan looked at Lin Chengjian and the others again, who knew that they looked at each other and fell silent for one second, two seconds, three seconds... "Ahhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhh!!!"
The sudden burst of screams continued to shatter the ceiling of the laboratory. If it weren't for the solidified glass to isolate the noise pollution from affecting the laboratory equipment, Sheng Ming'an, who loves laboratory equipment, should look down, and Chen Jing, who was in charge of paying for the equipment, He should be cold-faced and drive people out.
But at this innocuous moment, they indulge every team member to enjoy? Indulge in the unspeakable excitement and excitement.
Under the premise that the signal gain of the laser is inversely proportional to the pressure of the gas, the fast cross-flow co2 technology can be considered in the system.
The second is light source optimization.
Based on the particle swarm optimization algorithm, the formula v^(k+1)=w v^(k)...
Light source and mask, light source normalization...
"Ming An?...Sheng Ming An?"
Sheng Ming'an came back to his senses, met Chen Jingqiu's quiet and dark eyes, scratched his cheek with his index finger and asked, "Is there something wrong?"
Chen Jingqiu was helpless: "Can you be distracted during the break?"
Sheng Ming'an: "I'm thinking about the algorithm of laser structure and light source optimization."
Chen Jingqiu: "Break is to let the brain empty and relax. You see, Lin Chengjian and the others drink tea and gossip as soon as they arrive in the lounge, and they never mention scientific research projects."
Sheng Mingan looked back and realized that Lin Chengjian and the others had all left.
"They were just discussing the double-bench R&D team and comparing each other. I feel too much pressure, so I don't want to hear it."
Chen Jingqiu stared at Sheng Mingan, and after a few seconds came to a conclusion: "It's a lie. I'm afraid you don't know how to write the word pressure."
Sheng Ming'an propped his head and looked directly at Chen Jingqiu's gaze, with curved eyebrows and eyes: "I'm really under pressure. I submitted an application for early graduation in June. When the time comes up? I can't make up the remaining two years of credits, so I can only do it as soon as possible." Solve the light source system, rely on this to make the school network open, and agree that you and I can complete credits as special talents."
Chen Jingqiu picked up the white porcelain cup by his elbow and poured black coffee. While operating the coffee machine, he said, "Don't count me in, I've almost completed my credits."
Sheng Ming'an was stunned: "Where did you find the time to study?"
Chen Jingqiu laughed: "Me? It's not like you have to spend all day in the laboratory to follow the progress of research and development. Except for some things at work that need to be dealt with, the rest of the time is very free."
Yeah?Sheng Mingan was a little skeptical, he always thought that Chen Jingqiu was very busy.
The truth is that Chen Jingqiu is not as idle as he says, he is just good at using every minute and every second, and knows how to deal with two equally important things that are incompatible in time and space contradiction.
It's about EQ, and a skill acquired by struggling to survive from the cracks. That's something that the simple and transparent Sheng Ming'an can't understand if he doesn't come here.
Chen Jingqiu stretched out his hand and said, "Give me the thermos cup, and I'll help you remake the pot of tea."
Sheng Ming'an's eyes fell on Chen Jingqiu's open palm. The palm was white and clean, with clear palm lines and deep lines. The lines representing emotion grew deep into the gap between the index finger and middle finger.
The deeper and longer the line of emotion, the more affectionate and meaningful the owner.
Sheng Ming'an handed the thermos cup at his elbow to Chen Jingqiu, who took it, opened the lid and poured out the unfiltered tea dregs inside, and then dug out a few cans of unknown tea leaves from the tea cabinet.
What kind of tea should be grasped more? A little bit, what should be grasped less, Chen Jingqiu seems to have taken a scale and weighed it. After grasping it, put it into the filter bag, boil hot water to brew it again, pour it out, and brew it again. The action is smooth and smooth .
The cuffs that were rolled up to the elbows accidentally fell off? Chen Jingqiu stroked them back casually, the wrist bones were still prominent, skinny and sharp, but not lacking in strength.
Sheng Mingan blinked, and when Chen Jingqiu handed over the thermos cup, he suddenly grabbed Chen Jingqiu's wrist and found that he was still a long way from being able to completely enclose it.
His fingers were already slender enough, but he still couldn't wrap around Chen Jingqiu's wrist.
No wonder Chen Jingqiu's wrist looks so thin but still full of strength, because the bones are big and covered with a layer of lean flesh, so it looks extraordinarily sharp.
Chen Jingqiu took a breath, and his Adam's apple rolled: "What... are you doing?"
Sheng Ming'an raised his head: "I? Can't be restrained."
The distance is quite close, Chen Jingqiu is dazed.
Sheng Mingan has grown up in the past two years. He has grown from a boy to a slender and tall young man. His face is more beautiful, and his eyebrows and eyes are carefully carved. If he approaches him suddenly, he will be fascinated by this beautiful and cold shock. .
Sheng Mingan felt that it was not interesting so he withdrew his hand. Chen Jingqiu suddenly grabbed his hand. It was soft and fair, a little dry, with even flesh and blood, and his fingertips were glowing a healthy pink. He couldn't help but want to kiss this hand. Nice cute fingertips.
"Chen Jingqiu?"
After calling a few times, Chen Jingqiu came back from the charming thoughts, met Shang Sheng Mingan's suspicious eyes, and put down his hand as if nothing had happened: "Suddenly touched me? Your wrist is itchy, conditioned reflex."
"Oh." Sheng Mingan didn't suspect anything, took the thermos, squeezed his sore shoulders, and said at the same time as Chen Jingqiu: "The research and development of the light source system is at a critical moment, so I won't go to lunch break to waste time."
Chen Jingqiu's heart was still burning hot. Hearing the words, he didn't say much. He tried to dissuade him. He nodded in response and said, "I'm going to do the work at hand too."
The two left the tea room together and went to the underground laboratory. On the way, they saw Ji Hai hurrying out of the office? He entered the elevator and went back to the first floor. They probably skipped work again and left.
Sheng Ming'an: "Ji Hai? Isn't someone going to deal with it as soon as possible?"
Ji Hai hadn't contacted Zheng He for several months, and they all guessed that Zheng He didn't think that Blue River Technology would pose a threat to Hongxin, so he gave up stealing Blue River Technology's core technology, and at the same time gave up Ji Hai's pawn.
But Chen Jingqiu has not dealt with Ji Hai so far, Sheng Mingan is a little puzzled.
"It doesn't matter if he's around." Chen Jingqiu said: "And I? Hope to make the best use of everything."
The implication is that getting rid of Ji Hai now cannot maximize the benefits.
Sheng Mingan said 'Oh', as if thinking of something, he reminded: "Chen Tianhe may have something to do with Hongxin."
Chen Jingqiu turned his face sideways, his eyes were a little sharp: "How does Ming An know?"
Ming An?
No one has ever called him that before, but Chen Jingqiu has blurted out several times recently, calling him this? It seems very intimate and ambiguous to take off a surname and only call him by his first name.
Sheng Mingan replied to him: "The directors of my foreign company strongly demanded to invest in Hongxin the year before last, so while I noticed Hongxin, I also found that the relationship between Chen Tianhe and Hongxin was a bit strange. I suspect that Chen Tianhe is probably The boss behind Hongxin."
Of course he can't say that the system told him this secret.
Chen Jingqiu said in a low voice, "As long as you notice, you won't be able to hide it from you."
Does this mean that he has long been aware of the relationship between Chen Tianhe and Hongxin?
Chen Jingqiu: "Don't worry, I? I was prepared."
Sheng Ming'an responded, waved his hand, and changed into the equipment for a dust-free constant temperature laboratory, and entered the laboratory.Chen Jingqiu also went in and was busy for a while, during which Lin Chengjian called out?
Lin Chengjian: "Secretary Cao is looking for you."
Chen Jingqiu took off his mask and mask, took off his gloves, and paused, "Cao Wenhan, deputy secretary of the Tianjin Municipal Party Committee?"
Lin Chengjian: "Yes."
Chen Jingqiu sorted out what had happened recently in his mind, and finally said with a smile: "It seems that Hongxin is about to declare bankruptcy if it can't hold on. Chen Tianhe gave up without even putting on a show, but Cao Wenhan found For Blue River Technology, the turmoil of Hongxin's bankruptcy should have spread more than we originally estimated."
He knew Chen Tianhe very well, and he knew that this person was only looking for profit, and it was impossible for him to really waste money and spend on lithography machines.
Hongxin and Gexin are both projects in the same industry. He has been secretly paying attention to the development progress of the Hongxin project, and he is very clear about the development progress of the other party's lithography machine. After all, Zheng He is not the only one who came up with the undercover trick.
Hongxin will go bankrupt, sooner or later.
Taking off the gloves and the lab coat on his body, hanging them up neatly, putting a name tag on them, closing the cabinet door, Chen Jingqiu put on a thin casual suit jacket, and strode out.
"Cao Wenhan went to Blue River Technology, and someone should guide him." Lin Chengjian said.
Chen Jingqiu: "Chen Tianhe must be one of them."
The two went back to the top floor one after the other to see Cao Wenhan who came to visit in person. The door of the office was closed, and the two sides did not know what they talked about inside.When the sun gradually slanted to the west, Cao Wenhan came out with a happy face. He shook hands with Chen Jingqiu, who escorted him to the elevator door, and left.
When Cao Wenhan visited Blue River Technology, he didn't disturb others much, but when he returned to the city hall, he started to deal with a series of troubles caused by Hongxin's fall. Ministry of Commerce.
For a while, people panicked.
***
At the beginning of May, Hongxin struggled to support, sold lithography machines worth 4 million yuan, mortgaged equipment and land, and eased the financial distress. However, the chip supply was cut off for one day? It has not been resolved, and no matter how much money is filled in, it is useless.
Companies that are also dragged down by chip supply cuts include Huaxing, as well as many other downstream industries.
Other affiliated companies in the semiconductor industry saw that Huaxing and Hongxin were so embarrassed by the US Department of Commerce's simple chip export ban, and couldn't help but feel cold, so they quietly worked hard in private to delay their survival time as much as possible.
The news that a professor at Shuimu University has developed a double workbench for a lithography machine has become a stimulant for the industry, injecting a little vitality into the sluggish Huaguo semiconductor industry.
At the end of May, the light source system in the Blue River Science and Technology Laboratory entered the acceptance stage.
In cooperation with Chuncheng Institute of Optics and Mechanics, the optical system (a series of optical components such as precision lenses, mirrors and lenses) provided by Guoke Precision, which is a shareholder of Spring City Institute of Optics and Mechanics, is based on this optical system. acceptance of the experiment.
Sheng Mingan served as the chief engineer of the light source system, with Dean Cheng on his left and Chen Jingqiu on his right. Behind him were Lei Ke and his team and the R&D team brought by Dean Cheng.
Originally, the research and development process of the light source system was not so fast, but with Dean Cheng's research and development team, it was even more powerful, and the process was quickly shortened by half.
Now is the moment of acceptance of the light source system, not the simulation or modeling run on the computer software, but the experimental acceptance stage of the light source system of the real equipment!
Lei Ke swallowed nervously, and caught sight of Du Song from the corner of his eye? This guy was so nervous that his arms were shaking!
Really? Not promising!
As he thought about it, he didn't know that his performance wasn't much better.
It is estimated that no one present is not nervous, oh, except for Sheng Ming'an, who is very calm during the acceptance stage of any major scientific project, like an outsider, which makes people both envious and jealous.
Dean Cheng glanced at the electronic watch on the right, and the time was 19:42:31.
He said softly: "Let's get started."
After a pause, Dean Cheng said: "Sheng Gong, why don't you come?"
"Huh?" Sheng Ming'an was a little surprised. To be honest, Dean Cheng was a few rounds higher than him in terms of seniority and seniority. He was embarrassed to be called 'Sheng Gong' by the elders and humbly said: "You call me? The name is fine. Light source The research and development of the system also has your part, or you come?"
Dean Cheng waved his hand and refused with a smile: "I? In this? Life, I have carried out many scientific? Large-scale project acceptance stages, so I won't compete with young people for the experimental acceptance of a light source system. Besides? The light source system is mainly planned and completed by you. , I? It’s just a support that came out halfway, don’t refuse if you do, and it’s time to get off work if you continue.”
Fine.Sheng Ming'an nodded, signaling the R&D team behind him to take their positions, staring at the full set of light source system equipment in front, and said calmly: "Start the acceptance. Get ready—"
"Data recording, light source acceptance recording, and power consumption recording have been started."
"The target device is confirmed? Loading is complete."
"Is the power supply OK?"
"The [-]-watt carbon dioxide pulsed laser has entered the preheating state."
"..."
One after another of the reports came and went in the empty, pale and silent laboratory. Each sentence of the report was short and powerful, well-arranged, neat and fast, and for no reason affected the nervous anticipation of other R&D team members who were waiting for the acceptance results.
"Activate the carbon dioxide pulse laser!"
As soon as the voice fell, Sheng Mingan pressed the switch button, and everyone looked up at the light source system equipment in the constant temperature and dust-free laboratory ahead. The spotless silver-white equipment exuded a wonderful inorganic mechanical beauty under the cold light.
The surface of the machine is very calm, Sheng Ming'an and others can't see the changes that are happening inside, they can only judge whether it is successful or not based on the final result, and the process is very short and fast, as fast as [-] times per second!
Sheng Mingan's black technology system can spy on the changes inside the machine. It switches the viewing angle to help Sheng Mingan enter the light source system equipment to view the experiment.
The angle of view is first the silver-white machinery, and it instantly penetrates into the equipment that is as complex as a huge mechanical processing factory. Time and space are blurred, and the interior is dark, like a chaotic universe that has not yet opened.
Suddenly, there is a shining light spot in front of you. First, four hairline-sized curves surround a circle. A point of light in the center of the circle gradually expands outward, expanding from a dot to an oval shape. The light becomes more and more intense and more and more Bright, flashing and dazzling white light suddenly burst out, instantly illuminating the dark interior, a slender and shiny purple light burst out of the light opening, passed through the long round tube, entered the beam corrector, and passed through the energy converter...
Eventually it hits the target material (tin droplet) with a diameter of 30 μm.
The angle of view follows one of the rays, and suddenly pulls back, and within the range of the angle of view, tens of thousands of purple slender rays pass through one round long tube after another, and finally hit the same target material ionized tin twice on average. Atoms, release plasma?, excite nano-scale photons, and complete the exposure step of the lithography machine.
Even if the viewing angle is further back, even a system with 200 years of advanced technology cannot help but be shocked by the interior of the EUV, which is known as the crown of the industry.
The laser beam is homogenized and collected by multiple mirrors, projected on the mask, and hits the target material to obtain the required plasma.
The next step is to use the collecting mirror to collect the plasma? The divergent euv radiation is converged into a light source and sent to the photolithography system, and the final ic wafer is obtained through the exposure system.
However, Sheng Ming'an's team did not do the next two steps, but only designed the experimental design of the light source system.
The high frequency of [-] times per second not only needs to ensure that the process is error-free, but also must ensure accuracy, precision, mass production, and maximize power utilization, etc...
Therefore, the results of one experiment cannot prove anything. They have performed multiple consecutive experiments, recorded the data for comparison, and calculated an optimal probability.
With the crackling of the keyboard, everyone waited with bated breath.
The assistant girl suddenly grabbed Du Song's arm and grinned: "giao! How's it going?!"
Du Song also bared his teeth in pain, almost crying: "I? I don't know."
The assistant girl again? She didn't want him to answer, her eyes sneaked towards Sheng Ming'an, and she was sobbing in her heart. Even if she was covered from head to toe in a dustproof suit, Sheng Gong was still extremely handsome, so hurry up and tell her the result!
Sheng Mingan: "Each group reports the results."
coming!
Everyone is excited!
A group of reports: "The carbon dioxide pulsed laser is non-destructive, the power consumption is within the estimated range, and the light utilization rate successfully reaches 2%!"
Report from the second group: "The cooling system is activated! The cooling function is normal!"
Three groups of reports: "Sensor feedback laser and droplet synchronously aligned, laser plasma captured within the estimated range!"
Four sets of reports...
As one after another reports that were identical to the simulation estimates came to everyone's ears, it indicated that the experimental acceptance of the light source system equipment was successfully completed!
Everyone held their breath and waited for Sheng Mingan to conclude.
Sheng Mingan lived up to expectations. After listening to the results reports of each group, he announced to the loudspeaker: "The high-end lithography machine light source system technology research project has successfully passed the acceptance." He slightly raised the volume, "Our scientific research project, laser plasma? The UV? Lithography light source is—"
"13.5nm!"
The smiles that had just risen on the faces of the people who wanted to cheer suddenly froze, their pupils gradually dilated, their breathing was short of breath, and they couldn't believe it. They thought their ears were broken and they had auditory hallucinations.
There was a relaxed smile in Sheng Ming'an's tone: "Congratulations, everyone."
Seeing no response from the crowd, he turned his head and wondered, "Aren't you satisfied?"
Lin Chengjian was also dumbfounded, and asked cautiously: "Sheng Gong, you just said? 13.5nm...not 16nm?"
Dean Cheng, who had already been shocked after arguing with Sheng Ming'an for nearly half a month, looked around amusedly at everyone's different expressions.
Lei Ke was softer than Lin Chengjian: "Is it 14nm more accurate than asmleuv's 0.5nm?"
Du Song clutched his heart, and murmured: "Isn't it... I? This is what I study all day long?"
The assistant pinched harder, but Du Song's excited soul and excited nerves could soothe the pain in his body.
"Ah," Sheng Ming'an subconsciously looked at Chen Jingqiu: "Do you all have any objections?"
After being surprised, Chen Jingqiu smiled: "There is no objection. They were overjoyed."
Sheng Mingan looked at Lin Chengjian and the others again, who knew that they looked at each other and fell silent for one second, two seconds, three seconds... "Ahhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhhh!!!"
The sudden burst of screams continued to shatter the ceiling of the laboratory. If it weren't for the solidified glass to isolate the noise pollution from affecting the laboratory equipment, Sheng Ming'an, who loves laboratory equipment, should look down, and Chen Jing, who was in charge of paying for the equipment, He should be cold-faced and drive people out.
But at this innocuous moment, they indulge every team member to enjoy? Indulge in the unspeakable excitement and excitement.
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