Black Technology Refresher Manual

The most basic deployment strategy of Blue River Technology has taken the first step. A technological chain to break through high-end domestic lithography machine technology has already taken shape. The next technological breakthrough is the most important difficulty.

After Sheng Ming'an and Shen Wenbing talked about the specific details and some opinions on the technical difficulties of arf photoresist, they left Yongcheng and returned to Jin City, while Shen Wenbing collected information on the research and development projects of arf photoresist and supporting materials. Information, ready to apply for project approval, it is estimated that the probability of passing is very high.

The R&D and industrialization of high-end photoresist and supporting materials are originally in the national special project 02. According to the previous trajectory, arf photoresist (193nm photoresist) will be approved by NTU Optoelectronics three years later and won the national Funded by the scientific research fund, the acceptance will be completed within two years after the project is approved.

Now Sheng Ming'an's intervention is just to let the arf photoresist be developed in advance, and the R&D team and special ownership still belong to the original owner.

After Sheng Ming'an completed the preliminary strategic deployment, he hurried back to the Blue River Technology R&D Department to prepare for the research and development of the light source system, and there was almost no chance to stop and take a breath.

No? It's just that he, the entire Blue River Technology, and everyone else are all dizzy and busy like a spinning top.

The system is curious why Sheng Mingan? No? Break through all the core technologies of the lithography machine independently?

He has memories from his previous life, and he is familiar with tens or hundreds of core technologies of lithography machines, which are enough to easily break through. There is no need to look for scientific research teams all over the country and try hard to persuade them to cooperate with Blue River Technology.

If Sheng Mingan alone develops a lithography machine, all patents will belong to him.

The wealth and reputation brought by patents are endless. Any domestic technology company that wants to produce materials for lithography machines such as wafers, photoresists or double workbenches will have to spend money to buy them from him. The patent fee of the material, not to mention the high-end lithography machine completed later.

Even if he can graduate directly, the school will give him the green light, maybe even give him a national academician and honorary professor.

This is really not a "joke"!

The status of the lithography machine is so important!

And as long as Sheng Mingan breaks through these technical problems and hand them over to the R&D Department of Blue River Technology to perfect them, they don't have to follow him? Paving the way for Gexin's future.

The system is very curious, so? So? Ask the exit.

Sheng Mingan was designing a complex light source system, he was stunned for a moment, and looked back at the busy team behind him.

The assistant on the right is a young girl wearing glasses. Noticing Sheng Ming'an's gaze, she asked softly, "Boss, would you like a cup of black coffee?"

The girl just walked out of the school's laboratory not long ago, and she is used to calling the team leader 'boss'.

Sheng Ming'an: "Just pour some strong tea?"

The girl got up, picked up the cup by his table and poured tea?

System: [Host, is it? Let me ask you. 】

Sheng Ming'an rubbed his temples and felt that the words in the draft book were a little blurred. He didn't know whether it was because he was too tired or there was a risk of myopia. In his previous life, he had been writing calculations at his desk for a long time, so he was mildly myopic.

'Um. '

The system urged: [Host? 】

Sheng Ming'an thought for a moment, and when the girl poured strong tea, she replied softly thank you, and then answered the system in her mind: "No? It's my thing." '

It's a very simple reason, isn't it? His stuff, even if the knowledge of overcoming technical difficulties learned in the previous life belongs to him now, but the created technology doesn't belong to him.

The lithography machine is important, but it is not to the point of imminent fire, and it is necessary to snatch the luck that should belong to others.

He said: 'Why? Ask me this? Question? '

System: [Because I don't understand. 】

Sheng Ming'an: "Don't you? You should know better than me?" '

system:【? 】

Sheng Ming'an: 'Didn't you find out?Every checkpoint given by the black technology program seems to be a future black technology, but it is actually based on the theories and discoveries of the great physicists in the past, but the program sums them up and inspired me. '

After cracking two levels in a row, Sheng Mingan saw the routine of the black technology program, whether it was a level or a so-called reward? Just? Tell him that an answer is an inevitable result? Or? Give it? Seems like Rather than the so-called reminders, he will continue to ponder, search and unlock based on these existing reminders and the conclusions of the predecessors, and then he will come to his own achievements.

Sheng Ming'an didn't know? Didn't he know in his previous life? He, besides the lithography machine, what would be the quantum error correction algorithm? and the petawatt-level laser system solution? Who will solve it.

He was a little curious, so he asked.

System: 【...No? I know. 】

Sheng Ming'an:'? '

System: [The record was destroyed?. 】

Sheng Ming'an: "Before the records were destroyed, you didn't know? '

System: [No? Remember. 】

The system also finds a problem, and it starts a self-inspection program to conduct a comprehensive search from the outside to the inside.

Sheng Mingan drank a cup of strong tea, and there was something thoughtful in his eyes.

***

Everyone at Blue River Technology is very busy, and the R&D department is even more so busy. As the deputy head of the R&D department, Ji Hai was made a commercial espionage for the first time in his life. Actively come to work, but also? Drink tea and read newspapers in the office every day.

By chance one day, the R&D department was suddenly busy. Ji Hai was alert, thinking that there was a new move, so he hurriedly called Du Songjin to ask, "Is the R&D department? The boy and his? What has the little white-faced lover been up to lately?"

Last time, he gave Du Song a bank card with a deposit of ?[-], but Du Song didn't return it. Ji Hai acquiesced that he was one of his own, and he had no scruples about asking questions.

Du Song remembered Chen Jingqiu's exhortation, if Ji Hai asked, he would reveal some information and ask him to bring it to Zheng He.

"The R&D department under the leadership of Shengshen is preparing to break through the core technical issues of the light source system. The project has already started?" Du Song said truthfully: "Lin Gong is busy leading the team to design chips. As for Mr. Chen, it seems that he is discussing cooperation and investment. Category."

Ji Hai is a little confused. Is there any difference between saying this and not saying it?

"How about progress?"

"What? Progress?"

"Core technology? A joint investment project?!"

"Then I don't know!"

"you--!"

Ji Hai didn't think he should look for Du Song? Idiot, he held back his anger and persuaded in a low voice: "I told Hongxin, they said they welcome technical talents. If you? Figure it out, bring some research and development. Go see Mr. Zheng with the information from the Ministry."

Du Song was vague: "I'll think about it again."

Ji Hai thought of something else, didn't persuade him much, waved him out, turned around and skipped work to find Zheng He and handed over the information provided by Du Song, in exchange for Zheng He's sneer?

"Blue River Technology has been both responsible for IC design and light source system manufacturing for lithography machines. The news is known in the industry! Lin Chengjian's identity, I have already found out?! Chen Jingqiu is looking for investment and cooperation everywhere, but he hits a wall everywhere, you Think I don’t know?!” Zheng He was a little angry: “Are you kidding me?!”

Ji Hai wiped the cold sweat from his forehead, and frantically denied: "No? No? No? Yes?..."

Zheng He snorted heavily, and his gaze of examining Ji Hai was like a blade, as if he had doubts about Ji Hai's talent: "Those scientific research achievements? Are they really yours?"

Ji Hai nodded again and again: "Of course it's all mine! Mr. Zheng, you say I'm the only one who engages in scientific research, why? I can handle such a thing internally?"

If? No? Yes? Most of the researchers are not good at dancing, Zheng He would have kicked the boat.

"Although the information you searched is useless, doesn't it mean that Blue River Technology is indeed in a difficult situation recently." Zheng He's face softened a little, and he sneered and said: "Blue River Technology can't get investment, revolution No one is looking at the core project? Well, Chen Jingqiu didn’t think of a way? Solve the imminent funding problem, but went to various research teams to find them to cooperate in breaking the lithography machine technology!”

"Hahahaha..." Zheng He shook his head, shaking his index finger up and down to taunt: "Stupid! Naive! Sure enough, or...too young! Technology is? The core is right, but doing this is just trying to catch a fish!"

How can it be so easy to break through the core technology?

From the establishment of the project to the obtaining of funds to solve the key technical problems and realize the industrialization of those scientific research teams, it is not a matter of one day!

Chen Jingqiu thought that he was the only one who was smart, and that they thought of this? The way to combine technology chains?

Let’s just talk about that? The core technology of the double workbench of the lithography machine has been approved by the national 11 special project in 02. So far, the longing has passed? There is no result yet.

Technological breakthroughs are first and foremost? Funds, without funds? What kind of company should students start?What to do? Technology development?

It's so stupid to ignore the unreliable foundation under your feet with such a naive and passionate idea.

Zheng Heru? Thinking indifferently and arrogantly, he dismissed Ji Hai and briefly reported the news to Chen Tianhe.

Chen Tianhe was getting off his private plane and landed on American soil.

"What about Chen Jingqiu? You don't have to tell me." Chen Tianhe said indifferently.

He looked up? The brightly lit city—

Qualcomm headquarters in San Diego, California.

What is the purpose of Chen Tianhe's trip?

***

The light source system is the core of the lithography machine manufacturing, the initial step of the wafer lithography project, and is closely related to every subsequent step of the lithography project.

The main three major units of the light source system are the generation, collection and homogenization of light. The light source system of the first-generation lithography machine also includes light purification, but the light sources produced by the fourth-generation and fifth-generation lasers have met the requirements. , just make the light uniform?

Light is an engraving tool, produced by a laser, and involves three technical indicators, namely lithography resolution, overlay accuracy and production capacity.

There is a calculation formula for the lithography resolution. Adjust the influencing factors according to the formula to improve the lithography resolution. This aspect is not difficult, but it is limited by the mask design and resist process, etc., and it must be achieved at the same time. Optimizing can achieve ideal lithography resolution.

Overlay accuracy is related to and directly affected by lithography resolution.

As for production capacity, it is related to the stability of the light source system.

The above are the requirements for the laser. Compared with the technical requirements for the entire light source system, the technical requirements are not too high. The most difficult step in the system engineering process is the collection of laser light.

It is difficult to collect and the conversion efficiency is low.

Leike sits in front of the computer, manipulating the mouse to do precise calculations in the software: "The required extreme ultraviolet light must be reflected in a vacuum, and cannot be refracted, because it is very easy to be absorbed. Vacuum The reflector in the cavity needs a special coating to guide the beam of light from the light source to the wafer... After more than a dozen reflections, the remaining light is less than 2%!"

The members of the research and development department who came to watch took a breath. Although they knew that the conversion rate of the light source was low, they still felt distressed when they heard that the figure was so low.

A low conversion rate of light sources means a huge consumption of energy. The most intuitive example is that an euv machine has an output power of about [-] watts and consumes [-] kWh for a day of work.

A light utilization rate of less than 2% is already the best data that can be obtained by optimizing other performances. The decisive key to this performance optimization is the accuracy of the reflector.

"Accuracy must be measured in picoseconds."

In other words, the precision of the mirror required by the lithography machine must be polished to one trillionth of a meter.

Sheng Ming'an: "Repeated coating with silicon and molybdenum until the light utilization rate reaches the international standard."

At the moment, some people retorted: "They are all nano-scale coatings. Repeated coatings will also affect the accuracy. The process is too difficult!"

How difficult is it?

The most obvious and easy-to-understand analogy is to enlarge a mirror with a diameter of not more than [-] cm to cover the ground, and its plane fluctuations cannot exceed the diameter of a hair.

The lithography machine requires as many as forty or fifty layers of mirrors, and the plane accuracy is required to be flatter than one layer.

Only Zeiss of Germany, which has been passed down for more than three generations, can produce this kind of mirror in the world.

Of course, mirrors are not exported to China.

Sheng Ming'an: "No? Don't worry about whether the reflector can be polished. You just need to do your best to consider how the reflector can be used to the extreme in the unit of light collection and conversion."

"Data, models, regardless of failure or success, all are recorded."

Sheng Ming'an speaks like a machine gun, categorical and unrestrained, as if the light source system, which is extremely difficult, is well-structured and orderly in his eyes, and all technical difficulties can be easily solved.

He has a well-thought-out plan, but a gully in his heart.

He didn't need to speak comforting words, as long as he gave every instruction in a flat and relaxed tone, it would be able to calm the timid and unconfident hearts of everyone in the laboratory.

"Du Song, open your modelica and start the preliminary modeling and simulation of ultra-precise lasers."

Modelica is a computer language software that can realize simulation modeling of complex physical systems, and can be used for simulation modeling of some ultra-precision parts of lithography machines.

Du Song: "It is already being created."

He led his team members to bow their heads and get busy.

"Leike, please adjust the optical path structure."

"Okay." Leike signaled the assistant to open the opc (optical proximity correction) software, and correct the light and pattern by calculating the lookup table through the dynamic simulation results of the model.

Sheng Mingan is crawling on the table, designing the laser light source that the market needs. As far as the current technological development is concerned, the laser light source of the lithography machine is still dominated by laser plasma.

The amount of debris generated by driving the light source, the spectral purity, and the power and production capacity consumed by each technology node increase... In fact, the most advanced euv has a large power consumption and low production capacity, and it will not be solved perfectly in five or six years. The two? Question.

But isn't Sheng Ming'an clear?

Although he is unwilling to use the memory of his previous life to steal other people's achievements? To manufacture a domestic lithography machine in advance, but in his previous life? He perfectly solved the problem of low euv production capacity, so he habitually included this problem as one of the to-be-solved lists.

So much so that it broke through this technology node in one fell swoop to achieve the goal of surpassing ASML, which was really unexpected.

***

Around May 15, a big event happened in International Semiconductor.

The asml official website announced that it has broken through the bottleneck of mass production of lithography machines, and officially sold 14nm extreme ultraviolet lithography machines that can be mass-produced!

This move immediately stirred up waves, and the media from all walks of the world reported endlessly. Semiconductor enthusiasts were as lively as the Chinese New Year and published discussions one after another.Domestic post bars, technical forums, and almost new posts are constantly being posted, basically discussing the impact of ASML's move.

[Lithography giant: the real rise of ASML! 】

The headline of ASML news on China Science and Technology Network was moved to the domestic electronic enthusiast forum, and the forum owner has already shown that he moved the title? He recognized the division of the status of global semiconductors in the future.

[As the title says, from now on, asml is the only lithography giant! 】

[The era of Canon and Nikon has disappeared? The era of lithography machines blooming and competing together is gone forever. In the future, only asml will stand out! 】

[Although I don't want to admit it, Europe and the United States have achieved technological hegemony in an important field! 】

[Everyone, in conjunction with the press conference released by Intel and Qualcomm at the beginning of this year, which will realize 15nm core processors in 14 and 10nm core processors by the end of the year, and domestic lithography machines are still stuck in the third generation of 365nm light wavelength? Lithography machine technology node! 】

[Opened? Two generations?, 20 years behind. 】

[Hua Guo was strangled by the throat of the semiconductor industry...]

[Feels suffocated. 】

The other post is not so frustrating, but it is basically talking about ASML. Looking back on the history of ASML, it was never just a small company with a half-life...

[Who can still remember that ASML was on the verge of bankruptcy? 】

[At that time, Nikon and Canon were the big players in the hegemonic semiconductor field, but it was a pity that the immersion technology emmmm of TSMC boss Lin was blocked? Finally, it was missed by asml. 】

[The road to the rise of asml starts from this step [funny]. 】

[Fate is really amazing. Who would have expected that the famous and well-known Asmer would be the first to develop the fifth-generation lithography machine? 】

[In a low voice, does our country have the opportunity to develop a 14nm lithography machine? 】

[? ? ASML is willing to sell us an euv just to laugh? And also self-developed?Dreaming! 】

[Surely tell you: yes?! 20 years later! 】

[However, at that time, semiconductors may have undergone earth-shaking changes, Moore's Law has become invalid, and the existing lithography machine technology has reached its limit. machine, quantum laws replace? Moore's Law... We are left behind again by 20 years. 】

[It doesn’t have to be so pessimistic. Maybe 20 years later, Huaguo’s lithography machine technology will surpass Britain and catch up with the United States. 】

[Moore's Law is not so easy to be replaced? Do you think it is easy to re-create a law? 】

[Shengshen didn't? Yes? Solved? The problem of quantum error correction?Many people were inspired to invest in quantum research.As long as geniuses in a certain field come in groups, it is only a matter of time before the big problems are solved. 】

……

[What? Off topic?? 】

[Back to the topic, I pray that the U.S. imperialists won’t get one? See? If we don’t feel good, they will impose chip sanctions on us. 】

【What's the meaning? 】

【ASML is the largest holding company? Meidi Company! 】

Blue River Technology.

Lin Chengjian hurriedly entered the lounge of the R&D department. Sheng Ming'an and Chen Jingqiu were there, as well as Lei Ke, Du Song and others. They continued to discuss research projects while having lunch.

"Have you seen the latest news?"

Sheng Ming'an: "Asmleuv press conference."

"Yes!" Lin Chengjian sat down to wipe his sweat, took the water poured by Leike and said, "Now the global orders are flying to ASML. The price of one set is 1.2 million U.S. dollars, and the order has been in line for ~18 years."

The process of lithography machines is complicated, even if ?asml can only produce a dozen? units a year.

"People from Huaxin also went to place orders."

Du Song asked anxiously: "How? How?"

Doesn't Sheng Ming'an know the result without asking? Chen Jingqiu quietly picked out the spicy chicken nuggets in the bowl and put them neatly on the lid of the lunch box at the side, and then pushed them to Sheng Ming'an.

Chen Jingqiu: "I don't? Eat spicy food."

Sheng Mingan raised his eyes, glanced at his almost untouched bowl of spicy chicken, believed it.

Does the chili taste fragrant and numb? Choke the throat, the chicken is tender and juicy, absorbed? The aroma of the chili is very irritating to the tip of the tongue.

Sheng Mingan liked it very much, he said, "Thank you."

Chen Jingqiu smiled and looked at him.

A girl on the opposite side looked back and forth? The two of them thought that Sheng Shen and the boss were too gay?

Lin Chengjian: "Rejected?"

Du Song: "Fuck!"

Others were furious but helpless. Who made their technology lag behind others by more than ten or 20 years?

Those who fall behind deserve to be beaten.

The "Wassenaar Agreement" that Europe and the United States abide by? It is specifically aimed at prohibiting the import of high-end precision scientific instruments and technologies to China. ASML does not dare to violate the agreement and naturally refuses to sell euvs to China.

Without ?Euv, they still have to buy chips from TSMC, Intel, Qualcomm and other American imperial companies, and Baba sends money to see? People's faces.

Everyone in the lounge was depressed, and Sheng Mingan didn't notice it. He ate by himself. After eating, he picked up the hot water at hand and took two sips to relieve his tiredness. He felt transparent and comfortable.