Planet Builder

(chapter name is wrong, EUV Alliance)

Furukawa-kun? What's wrong? Everyone looked at him suspiciously.

Furukawa Taichi said: Just now, the Chinese Academy of Sciences announced that they have broken through the production technology of extreme ultraviolet photoresist and will start large-scale manufacturing and production of high-end photoresist!

What? The representatives of several major groups stood up abruptly, This is not something to joke about!

I'm not kidding! Furukawa Taichi said, Several photoresist companies in China have announced that they have obtained technical authorization and will immediately build factories and start production!

Seeing his anxious tone, everyone immediately inquired about the information as if he was lying.

Soon, they saw the news.

Is the confirmed news true? The representative of Tokyo Yinghua Group called and asked the president of the group's China region.

It's true, we have sent people to contact them, and they have also specially displayed samples and related data! the other party replied.

How can it be so fast? In the venue, the representatives of these cherry blossom photoresist companies looked at each other in dismay. They have only stopped stocking for a month, right?

In a month, their technological advantages and product monopoly will be gone?

Even Aoki Dagui was stunned. If this was the case, wouldn't they have shot themselves in the foot?

They have just withdrawn from the China market, and China has its own high-end photoresist. Isn't this giving up market share in vain? Is there such a stupid thing in the world?

Baga! the representative of JSR scolded, This is a market worth tens of billions of dollars a year. Just because of a stupid agreement, you handed it over?

Aoki Dagui didn't dare to speak casually. The energy of these multinational groups is not small. He could only say with a guilty conscience: Maybe they have broken through this technology long ago, and they have only announced it now.

No! Furukawa Taichi said angrily, This is entirely caused by your stupid agreement!

I got the news that because of this incident, China has mobilized experts from all over the country and joined tens of thousands of companies to develop together, so the progress is so fast! Under normal circumstances, they can never break through the extreme ultraviolet photoresist technology so quickly. !

Hearing Furukawa Taichi's words, other representatives glared at Daiki Aoki. When they used it for decades, they competed with the companies of Dengguo and finally established their position as the international leader in photoresist. Unexpectedly, they were overtaken within a month!

All this is caused by the comprehensive cooperation agreement!

Aoki-kun, we need an explanation! said the JSR representative.

Our loss is caused by the manager of Sakura Country! He must come up with a solution! said the representative of Tokyo Yinghua.

Our group will issue a protest letter! The representative of Fujifilm said in a cold voice. The protest they said was not for employees to protest in the streets, but a game at a higher level.

These big capitals are inextricably linked with the management of Sakura Island. Aoki Dagui is sweating coldly behind his back. He knows that his faction has offended a big capital group!

At that time, someone will definitely take the blame and quell their anger, and they will likely become the blamer!

Why, it's only been a month! Aoki Dagui was shouting in his heart. If this technological breakthrough is a few months later, Shenzhou will definitely give in, but why is it so fast?

...

The breakthrough of extreme ultraviolet photoresist represents that the most critical material problem of lithography machine and chip manufacturing has been solved.

At the same time, Lu Jianye's team has polished the lens needed for the EUV lithography machine. In the past, this thing was also one of the products that could not be bought with money. Only Hans's Zeiss company could manufacture it, but now, Shenzhou has been able to manufacture it by itself.

Other high-end components are also being manufactured simultaneously.

In terms of chip design, it is relatively simple. Shenzhou could have designed high-precision chips, but could not manufacture them. He Xingzhou made some improvements to complete the design of the 3nm process chip.

Now from the manufacture of EUV lithography machine and the production of 3nm process chips, there is only one last question left - EUV laser knife!

He Xingzhou came to the Institute of Optoelectronics to study with the team of Academician Yan Rui.

In the laser research room, Yan Rui was talking about the problems they encountered: We now use gas jets to bombard the target material with lasers to generate plasma, the plasma emits EUV radiation, and the EUV radiation passes through periodic multilayer thin-film mirrors. The formed focusing system is incident on the reflection mask, and the emitted EUV light wave passes through the projection system formed by the reflection mirror to image the geometry of the integrated circuit on the reflection mask into the photoresist on the silicon wafer, thereby forming an integrated circuit required lithography pattern.”

Theoretically, there is no problem with this process. He Xingzhou nodded.

But the problem is how to reduce the particles, high-speed particles and other pollutants in the plasma atmosphere while increasing the wattage of the EUV light source. Yan Rui said with a headache, otherwise the light source will deteriorate rapidly. Also, the extreme ultraviolet projection lithography system A reflective mask was used.

Our EUV mask defects are still as high as ldefect/cm2, and the manufacturing level of the inspection machine should be further improved.

The problem of the detection machine, I think Professor Lu's team should be able to solve it. He Xingzhou said, As for the problem of the extreme ultraviolet light source, I thought of a solution.

What plan? The group of academicians and experts looked at him.

He Xingzhou said: The increase in the wattage of the light source can use electricity!

After the high-power laser heats the load to form plasma and reflects multiple times, an extreme ultraviolet light source is formed. At this time, a discharge reaction chamber is designed to further transform the plasma and radiate brighter and purer extreme ultraviolet rays. , If there are multilayer mirrors, the nanoscale of EUV will be further improved, and it is possible to meet the requirements of the 3nm process!

In fact, this is the solution, but He Xingzhou is a little more euphemistic.

We have also imagined doing this! Yan Rui seemed to have some ideas, she asked: This electric energy reaction chamber...

I have a blueprint! He Xingzhou said.

Really?! When everyone heard him say that, their spirits were lifted, and they quickly said, Let's see!

Go to the conference room! He Xingzhou laughed.

Everyone went to the conference room together, He Xingzhou called Lumi, asked her to open the design drawings, and explained.

When he finished speaking, the audience fell silent. Everyone is thinking and calculating.

After a full ten minutes, Yan Rui was the first to stand up and said happily, Yes! According to my preliminary calculations, it is entirely possible for this solution to achieve the high-brightness extreme ultraviolet light source we require!

Yes, my opinion is the same! An old academician stood up, and he said excitedly: This discharge reaction chamber is really amazing! After the light source is refracted and lost, the electrical energy converts the plasma to form a new high-energy plasma, which is not only free of light pollution. , and further improve the purity of extreme ultraviolet rays, the light knife produced in this way, I am afraid that it can reach the best in the world!

He Zonggong, you are really a genius, you can even think of such a plan!

Then what are you waiting for, let's try it! The experts couldn't help it.

This is the beginning! He Xingzhou smiled, he knew that this attempt would be a success! This is a design that was completed after thinking and calculating for more than a month after unlocking the lithography machine technology!

...

In the country of lights, the Avengers are holding a convention.

This is not the Avengers alliance in anime and movies, but the EUV lithography machine technology alliance led by White Eagle.

It consists of industry giants such as Intel, AMD, Motorola and IBM, plus Sandia National Laboratories and Lawrence Livermore National Laboratories affiliated to White Eagle!

In addition to the White Eagle, there is also a similar one in the Western Alliance. It consists of more than 30 countries and hundreds of companies, all of which are related to lithography machines and chips.

ASML in Windmill Country can produce the world's top EUV lithography machine because of their support!

Now, because of the comprehensive cooperation agreement, the EUV alliance of the White Eagle and the EUV alliance of the Western Alliance have begun to cooperate to discuss the details of cooperation.

Alliance President Foster is sitting at the head. He was just appointed by the White Eagle Commander not long ago, and his style is much tougher than the previous one!

All the participating members are representatives from international giants! It can be said that these companies represent the world's top lithography machine and chip technology!

Sakura submitted a proposal to us, saying that the extreme ultraviolet photoresist technology has been conquered by China, and hopes to open the extreme ultraviolet photoresist market! Foster said slowly, Do you have any opinions?

Can't be open! The first representative to speak objected. He was a representative from Dow Group, Moulton, who was also one of the top five photoresist companies in the world.

He said righteously: Since we have reached a cooperation agreement, we must advance and retreat together. Today we open a photoresist, tomorrow someone will say that we need to open the transmission lens of the lithography machine, and the day after tomorrow, someone will say to open the lithography machine bearing. , if this goes on, isn't our cooperation agreement a dead letter?

Mr. Moulton is right. Immediately, some members supported his point of view, saying: The lithography machine and chip manufacturing technology must be firmly in our hands, and a hole cannot be opened!

Furthermore, it is still unclear whether Shenzhou's extreme ultraviolet photoresist is a laboratory product or energy production. If this is a scam they set up, we will be fooled!

Moulton's opinion was unanimously supported, and Foster nodded: In this case, maintain our existing measures.

In fact, for the EUV alliance, they and Sakura are not on the same front. When the alliance was established, it was aimed at the semiconductor industry of Sakura.

Therefore, they don't care about the life and death of Sakura-related industries!

Everyone should know about the trend of China's semiconductor industry. Foster entered the next motion.

They also set up an organization to jointly develop a lithography machine and want to catch up with us!

Referring to this, Haimo, the representative of ASML lithography company, said with disdain: It is impossible for them to catch up with us within ten years!

I can say this, even if we give them the design of the EUV lithography machine, the Orientals can't make it!

It's the top industrial technology in the world, and they're not even close!

After Haimo finished speaking, all the delegates in the room laughed, with arrogant expressions on their faces. Many people thought the same as him.

Someone also reminded: We can't let our guard down. In the past year, they have broken through many technologies!

Mentioning this, Foster's face turned cold and emphasized: Everyone, why are their technological breakthroughs so fast?

We suspect that there may be some members who did not comply with the regulations and leaked technical information!

So starting today, all high-end equipment and technology transfers between members must be submitted to the alliance for review, and private transactions are prohibited!

There have been audits before, but this time, we will increase our efforts to ensure that there will be no technical leaks.

For this point, all members agree that only technology monopoly can allow them to make a steady stream of big money!

Another representative of Qualcomm asked: We are not selling high-end chips in the East now, which is very harmful to our company. When will we be able to develop and sell them?

Yeah, our computer chip market has also been severely affected! Representatives of companies such as Intel, IBM and AMD couldn't sit still.

Foster motioned everyone to be quiet and said, That's why we're meeting here today.

Before the meeting, I had communicated with ASML that they are designing a new generation of extreme ultraviolet lithography machine with a 3-nanometer process.

We need to cooperate to help them come up with mature 3-nanometer process technology lithography machines and more advanced lithography machines as soon as possible. Our chip technology can be improved by one level, and we can open up a level of chips.

And there is a lot of pressure in the East recently. They will make concessions soon. What everyone will gain is more than what they have lost now!

Everyone communicated with each other and expressed their opinions. In the end, a preliminary agreement was reached. So many companies and institutions joined forces again to help ASML break through more advanced lithography machine technology.

Haimo, the representative of ASML, was even more excited and said at the meeting: Within two years, with your help, within one year, we will ensure the delivery of a mature new generation of extreme ultraviolet light with 3nm process technology. Engraving machine!

Okay! Foster was very happy, so that he could also interact with the top.

And as soon as he took office, he made such great achievements, and the future is bright!

He wished Haimo: I hope you can accomplish your goals as soon as possible, the EUV alliance is your strongest backing!

He thought to himself, by that time, those Orientals will definitely feel despair!

...

At the end of the EUV Alliance Conference, Shenzhou, Northwest Institute of Optoelectronic Technology.

He Xingzhou, Yan Rui and others are testing their extreme ultraviolet light source.

The discharge reaction chamber he had previously designed has been fabricated, linked with a laser transmitter, and various reflective lenses in between, forming an EUV light knife generator.

The first test, fire a laser! In the laboratory, Yan Rui looked at the instrument carefully and gave the experimental order.

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