Siheyuan: Craftsmen of a Great Country

After completing the communication with the Ministry of Industry, Jiang Chen took You Fengxia to the secretariat Yue Zexin the next day.

In addition to reporting to the Secretariat, I also express my determination to the Secretariat.

The determination to build the lithography machine industry chain and the determination to use You Fengxia.

The result was not surprising. The Ministry of Industry agreed to let Jiang Chen carry out some preparatory work in advance even though the lithography machine industry chain had not yet been formally established.

Of course, it is also recommended that Jiang Chen should not have a large-scale impact on the factory level. After all, there is a possibility that this industrial chain may not pass.

Naturally, there would be no objection to the use of You Fengxia.

After returning to the Seedling Institute, Wen Wan arranged for You Fengxia to join the institute, and she officially became a member of the institute.

Until she put on her work badge, You Fengxia felt like she was dreaming.

Since she learned the news from Li Guangfu, her identity has changed drastically in just a few days.

A few days ago, she was still an unemployed speculator at home with a tainted background. Not to mention being despised by others, at least people with a little status were unwilling to look at her straight in the eye.

But now, she has become a member of the most desired technical college among workers across the country, a formal worker, and the object of everyone's envy.

At this moment, she finally understood a saying: It is better to marry well than to be born well.

Although she is not married yet, and may not be able to really get married in the future.

But what Jiang Chen can bring to her is something that 99% of the families in the entire flower-growing family cannot do.

After officially joining the company, she began to improve her professional knowledge.

This is her greatest weakness.

She had to catch up on all the knowledge before the lithography machine project team was officially established.

Don't seek to know why it is so, but at least know that it is so.

In this way, when coordinating channels in the future, we will be able to communicate better with people and control the overall progress.

Time passes quickly and fully.

A month later, the Secretariat and the Ministry of Industry finally issued a joint notice agreeing to the establishment of the lithography machine industry chain.

There is also a top-secret document that agrees to the implementation of the Lithography World Project.

At the same time, Jiang Chen's feeling of being spied on also completely disappeared.

It seems that the higher-ups finally reached a consensus and chose to trust Jiang Chen and use his abilities to seek development.

After receiving the notice, Jiang Chen immediately brought together Luo Xue, Liu Yue, You Fengxia and Li Guangfu to start building a lithography machine project team.

The project team first recruited top workers, optical experts, material experts, engraving experts and other top talents from various industries across the country.

Perhaps their abilities do not allow them to directly participate in the production of lithography machines, but their experience will play a positive role in the process.

For example, a carving expert.

In fact, the etching of the lithography machine and the engraving in reality are completely different things.

However, they have been engaged in engraving work for a long time, and their experience in plane drawing and ability to understand space will be helpful to the development of lithography machines.

It took a whole month to finally complete the basic structure of this team.

Then, Jiang Chen spent another week explaining the principles and related knowledge of the lithography machine.

Finally, Jiang Chen directly proposed step-and-scan lithography technology and immersion lithography technology to increase accuracy and reduce light refraction.

After completing the theory, everyone sat down to discuss the theory of lithography machines.

Including its shape, components, connections, etc.

While discussing, Wanli was drawing.

When it first came out, everyone thought the lithography machine was very simple.

To put it bluntly, it's similar to a camera.

The final result is to change the presentation on photo paper into etching on photoresist.

Therefore, the structural sketch of the lithography machine drawn is quite simple.

Jiang Chen did not give any further hints about this.

Instead, it allows everyone to discuss each link in more detail.

For example, light sources.

Natural light is definitely not an option.

The etching effect is not good. The wavelengths of various lights are very different. Once refracted by the objective lens, you can tell that the photoresist will be a mess.

Then using a single light source is the option with the least interference.

So what light source should we choose?

Of course, the shorter the wavelength of the light source, the better.

Because the shorter the wavelength, the more precise the etching and the higher the integration of the circuit.

Purple light, which is undoubtedly the light with the shortest wavelength among common lights, is the best choice.

Is there any light with a shorter wavelength than violet light?

Yes, ultraviolet light.

The wavelength range of ultraviolet light is approximately 5nm-400nm, while the wavelength of violet light is between 380-450nm, and ultraviolet light is obviously much shorter.

So is there any light with a shorter wavelength than ultraviolet light?

Have!

Extreme ultraviolet light!

Under Jiang Chen's guidance, extreme ultraviolet light eventually became the best choice for light source.

How do we obtain extreme ultraviolet light?

A new round of brainstorming begins.

Some people have suggested that at a high temperature of 30,000 degrees, tin will be converted into an ion state, thereby emitting extreme ultraviolet light.

So how do we heat tin to 30,000 degrees?

High power CO2 laser beam!

The laser beam passes through a special vacuum-sealed beam tube and is focused onto tiny tin droplets, heating them to temperatures exceeding 3 degrees.

The question arises again: how to obtain a high-power carbon dioxide laser beam, and what equipment is needed to withstand the high temperature of 30,000 degrees?

With the birth of each plan, countless new problems will arise.

This is a reverse process.

Then find solutions to these problems one by one, this is the research and development process.

Once the technical problems have been solved theoretically, we need to start developing the technology and entering into practical operations. This is the implementation process.

The discussion was very intense, and after several days of discussion, everyone finally came up with preliminary solutions to all the problems they could imagine.

New problems have emerged.

Even if extreme ultraviolet rays are obtained through the above method, they are not pure extreme ultraviolet rays.

What method can be used to obtain a single extreme ultraviolet light?

A new discussion begins here.

The best option to separate extreme ultraviolet rays is to use a multilayer film structure made of alternating high and low refractive index materials.

So what material should be used for this film? Is it necessary to have multiple layers of film to refract all other light? How can the angles of each layer of film be set more scientifically?

Through theory and calculation, we can get a general direction.

The specific results need to be verified through experiments.

After solving this problem, everyone found that the complexity of obtaining extreme ultraviolet light far exceeded the sketch we had drawn when we first discussed it.

These two are just the simplest technologies in lithography machines.

It was not until this time that everyone realized that developing this thing was not as simple as everyone imagined.

After giving everyone a brief introduction, Jiang Chen asked everyone to follow this process and continue to discuss and subdivide the remaining technologies.

Until every link is considered.

Of course, these technologies, given China's current industrial foundation and layout, are simply not enough to complete the production of lithography machines.

Whether it is the light source, optical system, objective lens, mask, wafer stage, exposure system or focusing system, none of them can be solved.

At this time, it is necessary to reverse the results of the discussion step by step.

What industries’ support is needed to achieve these technologies?

What technologies do these industries need to meet the required support requirements?

Even some of the things that are explored may not necessarily be correct.

He also needs to continue to adjust and improve during the actual laboratory production process.

At the beginning, he did not put forward any specific requirements for the accuracy of the lithography machine.

No matter how precise it is, just make one first.

Only when we have experience can we know where to focus our efforts to improve the accuracy of the lithography machine.