The richest man's dad: I was restricted from high consumption at the beginning!

This is a research institute that has participated in many major national projects such as two bombs and one satellite, manned spaceflight, and aircraft carrier engineering.

Not to mention Bingcheng University of Technology, a university with the ability to launch satellites and even nuclear strikes, this is enough to explain its status!

As far as Academician Ma knows, in the early years, Bingcheng University of Technology was involved in an important scientific topic of the country, and had in-depth research in the field of optics.

Chapter 110 Project No. 012 of Bingcheng University of Technology! (1 more)

"I found out that Bingcheng University of Technology has submitted thousands of patent applications on light sources from 4157 (2000 in the Jesus calendar) to last year..."

Bingcheng University of Technology has been conducting research on extreme ultraviolet light sources since 4157, and has applied for some patents.

But at that time, who knew the importance of related research?

After 4157, Bingcheng University of Technology and the country started a project, and until last year... thousands of patent applications for light sources and extreme ultraviolet light sources have been submitted, and many patents have been approved.

Many patents have a great effect!

It's just that it's still a whole generation away from being used on a lithography machine!

There is a difference of more than 20 years!

Of course, these 20 years are the original lithography machine technology has been stuck for more than 20 years, that is the exploration from zero to one.

Pick it up now and study it, and you won’t be stuck for more than 20 years.

In the next two years, the project of Bingcheng University of Technology seems to be coming to an end, and there is no intention to continue.

Li Hao couldn't find out what the specific subject was researching, but judging from the time and number of patent applications, the number of patent applications decreased significantly in the next two years.

It's more likely not that you don't want to study...but that it's hard to study.

By this time, foreign research institutions have registered patents for extreme ultraviolet light sources.

Therefore, the number of patent applications has decreased, and the project may be over.

Input and gain are not directly proportional.

Bingcheng University of Technology, to put it bluntly, is a university that teaches and educates people, has limited annual research funding, and has too many research projects and topics.

Invest billions?Tens of billions to study light sources?

Schools don't need to open?

Do students still want to teach?

With so many professors, so many experts, and academicians, don’t you need funding for other topics?

Even if it is an enterprise, it dare not say that it has invested billions or tens of billions of funds to research light sources.

The key... This investment may not necessarily produce research results.

Academician Ma heard Li Hao say that Bingcheng University of Technology began to study extreme ultraviolet light sources in 4157, and he had this impression in his mind: "It is the No. 012 project, it seems to have ended last year, right?"

"I don't know the specifics, so I'll just ask for you. It just so happens that we have Academician Wang on board. He is the doctoral supervisor of Bingcheng University of Technology, the former director and curator of the Changguang Institute!!"

"Thank you, Academician Ma!"

Li Hao understood and thanked him.

Academician Ma smiled and waved his hands: "Don't say thank you, these are all small things, and you have brought enough help to our project."

"I know it's difficult to study semiconductor chips and lithography machines. You know it's difficult, but you still have to study it... Just for this, I will help you!"

"Academician Wang is a very good person. Changguang Institute also researched lithography machines at the beginning, but..."

"Hey, let me help you talk to him, he knows that you are going to invest in the research of lithography machines, and will definitely support you!"

"Then trouble you!"

……

After the New Year, Li Hao met with academician Wang Qihai, the former director and curator of Changguang Institute, the doctoral supervisor of Bingcheng University of Technology and the Department of Aerospace Power Technology.

Academician Wang Qihai came back in the new year and devoted himself to the research of the power system of the 003 ship.

I hope to see the completion and launch of the 003 ship as soon as possible, so as to accumulate enough technical experience, and wait for the 004 aircraft carrier to use better technology!

You know, Academician Wang is 79 years old and will soon be 80 years old, and he is still struggling in research, which is really embarrassing and even more admirable.

"This is Academician Wang!"

"Old Wang, this is the Xiaohao I told you about, a young man with great ability and ambition!"

Academician Ma sat down and introduced each other.

Academician Ma, who is nearly 60 years old, looks much younger in front of Academician Wang, so he should be honored as "Old Wang".

"Academician Ma praised you." Li Hao was very modest and respectfully greeted Academician Wang: "Academician Wang, hello, I am Li Hao."

"I've heard about you, it's amazing, with you and your team joining, the ejection technology is progressing very fast, our 003 has officially confirmed the installation of this function!"

Academician Wang is still responsible for the core power system of No. 003, which is responsible for making the aircraft carrier move and providing energy for the entire aircraft carrier.

The entire power system of the aircraft carrier is managed by Li Hao's electronic control system, and the research projects overlap with each other.

Of course I know that Li Hao and his team are very good.

Li Hao said modestly: "Everywhere, it's all thanks to everyone."

Everyone chatted for a while, and then officially entered the topic.

Academician Wang said: "Academician Ma said, you took over Hongxin? Invested a lot of money in the research of lithography machines? Where is the research so far?"

How difficult is the lithography machine?

Academician Wang was the director and curator of Changguang Institute at the beginning, but he has retired now.

Retirement is also re-employment for national treasure talents like this.

The old man did not allow himself to stop and rest, and chose to continue to toss on the front line.

When Changguang Institute gave up the research on lithography machines, it knew how difficult the blockade in this area was.

Li Hao also knew that this was the test of Academician Wang.

In other words, want to know how many technologies Haoding Lab has?

Research on lithography machines cannot be solved by investing funds.

Money is just the most basic thing!

The most important core technology, talents, time... and finally, funds.

"In terms of hydraulic technology, we have made breakthroughs... We have also done research on precision instruments and high-precision processing equipment."

"There have also been technological breakthroughs in rubber materials."

"We have solved the core lens!"

"There have been substantial breakthroughs in exposure technology, calibration technology, masking and other technologies."

"Downstream photoresist, photolithography machine gas and other technologies and materials have made breakthroughs!"

"Currently, my main research direction is light source..."

Li Hao used the "R&D Center" to develop a 5nm lithography machine, and has also researched on-board chips before.

Professional knowledge about lithography machines and chips, technical problems, etc.

He knew it perfectly.

Is it true?

Is there really a technological breakthrough?

He knew it after chatting with Academician Wang Qihai.

Academician Wang Qihai is not a professional researcher of lithography machines, but he still has a good understanding of optical engineering.

People like Academician Wang Qihai's generation don't focus on a certain field of research, they are considered masters in many fields!

superb!

There are researches and breakthroughs in China such as double workbench and multiple exposure technology.

Li Hao is more mature here.

In fact, the 32nm lithography machine entrusted to Qi Yong to buy from Europe uses a DUV light source.

Compared with ASML's current latest EUV lithography machine, the wavelength of the light source is relatively long.

The EUV light source can achieve 10-15nm, and the lithography machine can achieve 7nm process technology down to the micron level.

DUV is at most a 28nm process technology. Through multiple exposure technology, it can also achieve a 7nm process, which is already the limit.

A domestic research team said that the 7nm process can be achieved, that is, DUV technology uses multiple exposure technology.

It's just related technology...still in the lab.

theoretically!

Mass-produced lithography machines... can't be made at all!

The multiple exposure technology is also easy to understand: the original lithography machine directly lithography the circuit drawing of the chip onto the chip, the light source is relatively thick, and the process technology is limited.

Multiple exposure technology splits the original drawing on the chip into multiple parts, performs photolithography separately, and then combines them to form a complete circuit diagram.

In doing so, the DUV lithography machine can theoretically process 7nm chips, but this is also the limit.

5nm is impossible.

Even if multiple exposure technology is used to split the circuit diagram, the light source is still too thick, and when combined into a circuit diagram, errors will still occur.

This requires an EUV light source, which has a shorter wavelength. This 'light' is a more delicate carving knife that can carve finer circuit diagrams.

Chapter 111 Matchmaking, private visits on Weibo? (2 more)

"Hearing what you said, you are fully prepared for the field of integrated circuits..."

"I thought you just entered this field with enthusiasm and enthusiasm."

After hearing so much from Li Hao, academician Wang Qihai knew that this young man did not just study lithography machines in a whim.

From the perspective of technical reserves, this young team has technical reserves in downstream chip design and even chip materials.

"How are you going to solve the light source problem?"

Academician Wang Qihai also introduced to Li Hao the current research results of the Changguang Institute and Bingcheng University of Technology in the field of extreme ultraviolet light sources.

"Bingcheng University of Technology is conducting research on the field of optics on the National Project No. 012... The research on extreme ultraviolet light is just one of the categories."

"This topic was over last year... In the later stage, the relevant research has not made much progress, and the research and development investment is not directly proportional to the harvest."

"The Euv light source technology of Bingcheng University of Technology is based on Xe gas capillary discharge technology."

"It belongs to an early DPP light source technology, which cannot meet the requirements for making EUV lithography machines!"

"Changguang Institute's research on Xe plasma Euv light sources is mainly focused on various short-wavelength lasers, not on Euv light sources."

"The major domestic universities and research institutes are roughly equivalent to the level of foreign countries in 1998 in the research of EUV light source!"

Academician Wang Qihai is in charge of the Changguang Institute and is now a doctoral supervisor of Bingcheng University of Technology, so he knows both aspects very well.

Li Hao said: "In the Haoding laboratory, a device with a frequency of 1000kHz plasma extreme ultraviolet light source has been produced..."

"The collection system adopts the Wolte-X mirror structure to focus the 13.5nm extreme ultraviolet light source emitted in the tube to the IF point by means of grazing incidence... When the repetition frequency is 1 kHz, the 2 nm radiation light within 13.5π solid angle The power is about 1.4 W, and the estimated power at the IF point is about 100 mW."

"Currently, 13.5nm discharge Xe plasma extreme ultraviolet light source can be achieved!"

"It's amazing!" Academician Wang Qihai praised it without hesitation. He thought for a while and said, "This is equivalent to the technology of foreign countries for a few years!"

"From Duv light source to EUV light source, foreign lithography machine giants have been stuck for so many years... We don't need to cross the river by feeling the stones now, we just need to cross the river by feeling them!"

In terms of light sources, Li Hao has indeed invested a lot of energy in making such research progress.

Even the prototype of the light source equipment has been built!

Plus the various technical reserves that Li Hao mentioned before.

Haoding Laboratory's research in the field of lithography machines is really not to be underestimated.

Academician Wang Qihai felt that he had to help this young man no matter what.

This young man took over Hongxin with full of enthusiasm and invested a lot of money and energy in researching lithography machines and chips.